BRION TECH Industrial Partner

LithoTuner - Brion LithoTuner Pattern Matcher FullChip Simple Type: Pattern Matcher

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Part Number:
LithoTuner
Model Number:
LithoTuner
Make:
BRION
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Brion LithoTuner Pattern Matcher FullChip Simple Type: Pattern Matcher

LithoTuner - Pattern Matcher FullChip brings complete optimization across all critical structures with exact scanner performance characterizations.

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Features

  • Extends the set of tuning patterns by complementing wafer-based CD data with model-based analysis for the full chip
  • Full chip analysis ensures all critical features are optimized
  • Uses industry leading Tachyon models

Specifications


 

Applications

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Aliases

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